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Field Emission SEM Scanning used in Battery Industry

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Advantages

1.Schottky Schottky field emission electron gun has high brightness, good monochromaticity, small electron beam spot and long life.

2.The electron beam is used to accelerate the lens barrel to ensure excellent imaging performance under low pressure.

3.With high beam stability and low dispersion, it is suitable for long-term accurate analysis, such as CL, EDS, EBSD.

4.Non-conductive samples with low acceleration voltage can be observed directly without gold spraying.

5.Easy to operation.

6.Large sample storage to meet the observation requirements of different customers.



Specifications

Item

DJ-SEM1000

Resolution

1nm@30kv(SE)  3nm@1kv(SE)  2.5nm@30kv(BSE)

Magnification

6X~1000,000X

Electron gun type

Schottky field fires electron guns

Accelerating voltage

0~30kv

Automatic function

Focus, brightness/contrast, astigmatism, medium electron beam pair

Vacuum system

1 ion pump, 1 getter ion compound pump, 1 molecular pump and 1 mechanical pump

Detector

High vacuum secondary electron detector (with the protection for the detector)

Sample stage

Five-axis automatic pre-centering sample stage




Travel range

X

0~150mm

Y

0~150mm

Z

0~60mm

R

360°

T

-5°~70°

Maximum sample diameter

340mm

Optional detector

BSE/EDS/EBSD/CL

Optional accessories

Pre-drawing room\EBL\high and low temperature table\nano console\stretching table\hand control box\trackball






Applications:

Scanning electron microscope (SEM) is a precision instrument used for high-resolution micro-area analysis. At present, scanning electron microscope has been widely used in life science, physics, chemistry, justice, earth science, Micro research in the fields of materials science and industrial production.

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